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Lik'hemik'hale bakeng sa Mekhoa ea Semiconductor

cc09bd33a0ddd2aaadac4a8a4d3008a1Ho etsa semiconductor haholo ke ts'ebetso e amanang le lik'hemik'hale, 'me ho fihla ho 20% ea mehato ea ts'ebetso e hloekisang le ho lokisa holim'a metsi:

Re tloaetse ho bua ka lisebelisoa tsa lik'hemik'hale tse sebelisoang ha ho etsoa li-wafer e le lik'hemik'hale tsa ts'ebetso, tse tlang ka mefuta e fapaneng ea lik'hemik'hale (metsi le khase) 'me li laoloa ka thata ka bohloeki.Mesebetsi ea mantlha ea ts'ebetso ea lik'hemik'hale tsena ke e latelang:

Hloekisa bokaholimo ka tharollo ea lik'hemik'hale tse metsi le metsi a ultrapure;

Li-wafers tsa silicon tse nang le li-ion tse matla haholo ho fumana thepa ea silicon ea mofuta oa P kapa N;

Ho beoa ha likarolo tse fapaneng tsa li-conductor tsa tšepe le likarolo tse hlokahalang tsa dielectric lipakeng tsa li-conductor;

Hlahisa lera le tšesaane la SiO2 e le thepa ea dielectric ea heke e kholo ea lisebelisoa tsa MOS;

Sebelisa etching e ntlafalitsoeng ea plasma kapa li-reagents tse metsi ho tlosa lisebelisoa ka mokhoa o ikhethileng le ho etsa mohlala o lakatsehang filiming;

Li-reagents tsa bohloeki bo phahameng ba metsi li arotsoe ka lihlopha tse tharo: UP-S, UP, le EL ho ea ka bohloeki ba bona, 'me EL e arotsoe hape ka:

Sehlopha sa 1 sa elektroniki (EL-Ⅰ)
e na le likarolo tse sa hloekang tsa tšepe tsa 100-1000 PPb, tse lekanang le maemo a SEMI C1 C2;

Sehlopha sa 2 sa elektroniki (EL-Ⅱ)
boleng ba eona ba tšepe e sa hloekang ke 10-100 PPb, e lekanang le maemo a SEMI C7;

Sehlopha sa 3 sa elektroniki (EL-Ⅲ)
e na le lintho tse sa hloekang tsa tšepe tsa 1-10 PPb, tse lekanang le maemo a SEMI C7;

Electronic grade 4 (EL-IV)
e na le likarolo tse sa hloekang tsa tšepe tsa 0.1-1PPb, tse lekanang le maemo a SEMI C8;

Li-reagents tse hloekileng le tse phahameng haholo li tsejoa ka machaba e le lik'hemik'hale tsa ts'ebetso, tse tsejoang hape e le lik'hemik'hale tse metsi, 'me ke e' ngoe ea lisebelisoa tsa bohlokoa tsa lik'hemik'hale nakong ea tlhahiso ea lipotoloho tse kopantsoeng (IC) le li-circuits tse kopantsoeng tse kholo haholo (VLSI) .E boetse e sebelisetsoa ho hloekisa le ho khabisa holim'a silicon wafer.Bohloeki le bohloeki ba li-reagents tse hloekileng le tse phahameng haholo li na le phello ea bohlokoa haholo ho chai, thepa ea motlakase le ho tšepahala ha lipotoloho tse kopanetsoeng.Ho na le mefuta e mengata ea lik'hemik'hale tsa maemo a elektroniki le litlhoko tse phahameng tsa tekheniki.E ipapisitse le nts'etsopele ea theknoloji ea microelectronics.Ka nts'etsopele ea thekenoloji ea microelectronics, e tsoela pele ka mokhoa o lumellanang kapa pele ho nako.Ka nako e ts'oanang, e thibela nts'etsopele ea theknoloji ea microelectronics.


Nako ea poso: Jun-23-2022